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| 產品名稱： | 氣體流量測量校準主機 Fluke molbox RFM |
|---|---|
| 產品型號： | Fluke molbox RFM |
| 產品品牌： | 美國 - 福祿克 |
| 產品特色： | ?molbloc-L覆蓋的流量量程從1sccm到100slm，而molbloc-S覆蓋的流量上限更是達到了5000slm ?從20種不同的氣體中選擇 ?利用100:1可調性實現認證的測量不確定度±0.5%讀數 ?內部閥門，可實現內置的清洗、泄漏測試和自重支持 ?求和、取平均值、高值/低值及偏差等高級測量函數 |
molbox RFM 流量測量主機
molbox RFM是一個輔助單元，可使用molbloc-L層流和molbloc-S聲速流元件進行質量流量測量。
molbloc流量元件通過兩個壓力連接件和一根數據線連接到molbox RFM上。molbox RFM從molbloc EEPROM讀取校準數據，并利用其內置的高精度參考壓力傳感器(RPT)測量molbloc的上游壓力和下游壓力。歐姆測量系統讀取molbloc鉑電阻測溫儀的電阻，然后由此計算molbloc溫度。利用存儲在molbox RFM內存中的molbloc校準數據、壓力、溫度和氣體屬性，可計算出通過molbloc的氣流流速。對于molbloc-L流量元件，在流量量程10%FS以下時，可以選擇微量程選項來提高流量測量分辨度和精確度。
molbox RFM和molbloc流量元件應用廣泛，適用于需要高精確度測量低氣流的測量、測試和校準應用。對于主要考慮結構緊湊、量程可調性高、成本較低的應用來說，molbox RFM是理想之選。第二種型號molbox1+針對的優先考慮不確定度的應用。要配置質量流量校準系統，請查看隨后幾頁，選擇molbloc和壓力相關校準，以便更好的覆蓋您的流量量程和壓力狀況。molstic安裝系統和COMPASS? for molbox流量校準軟件可以幫您完善系統。
?結構緊湊
?molbloc-L覆蓋的流量量程從1sccm到100slm，而molbloc-S覆蓋的流量上限更是達到了5000slm
?從20種不同的氣體中選擇
?利用100:1可調性實現認證的測量不確定度±0.5%讀數
?內部閥門，可實現內置的清洗、泄漏測試和自重支持
?包括求和、取平均值、高值/低值及偏差等高級測量函數
?完善的前面板控制以及RS232和IEEE-488遠程通信
?利用可由用戶設置的參考壓力和溫度狀態，測量質量和體積流量
流量測量技術指標
molbox RFM可測量通過molbloc流量元件的流量。molbloc-L的流量量程、可用工作壓力和壓力差，或者molbloc-S的流量量程、絕壓量程，取決于所使用的molbloc元件和校準選項。請參閱 molbloc-L和 molbloc-S量程表，了解校準和量程詳情。
molbloc-L量程最高可達3E4，可通過微量程選項提高在10% FS以下時的分辨率和精確度。對于1E5-L molbloc，必須使用微量程選項才能達到技術指標。
molbox RFM | ||
molbloc-L (量程從1E1-L到3E4-L) | molbloc-S (所有量程) | |
測量更新速率 | 1秒 | 1秒 |
范圍 | 到molbloc滿刻度，取決于氣體和molbloc壓力 取決于校準類型(請參閱molbloc-L量程表) | 流量相對于20kPa～200kPa絕壓(3psia～30psia) 或20kPa～200kPa絕壓(7psia～70psia)上游 (請參閱molbloc-S量程表) |
分辨率 | 0.01%FS | ±0.01%讀數 |
線性 | ±0.23%讀數，從10%～100%FS ±0.023%FS，在10%FS以下 | ±0.25%讀數 |
重復性 | ±0.1%讀數，從10%～100%FS ±0.01%FS，在10%FS以下 | ±0.1%讀數 |
精確度1 | ±0.25%讀數，從10%～100%FS ±0.025%FS，在10%FS以下 | ±0.3%讀數 |
預測的穩定度2 (一年期) | ±0.15%讀數，從10%～100%FS ±0.015%FS，在10%FS以下 | 讀數的±0.2％ |
測量不確定度3
| ±0.5%讀數，從10%～100%FS ±0.05%FS，在10%FS以下 | ±0.5%讀數，從50kPa～500kPa，±0.5%流量@ 50kPa從20kPa～50kPa |
具有微量程選項的 molbox RFM | ||
molbloc-L（量程從1E1-L到3E4-L） | molbloc-L（量程僅僅是1E5) | |
測量更新速率 | 1秒 | 1秒 |
范圍 | 從0～molbloc滿刻度，取決于氣體和molbloc壓力 取決于校準類型（請參閱molbloc-L表格） | 從0～molbloc滿刻度，取決于氣體和molbloc壓力 取決于校準類型（請參閱molbloc-L表格） |
分辨率 | 0.01%FS，0.001%FS以下 10%FS | 0.01%FS |
線性 | ±0.23%讀數，從1%～100%FS； ±0.0023%FS，在1%FS以下 | ±0.25%讀數，從5%～100%FS ±0.0125%FS，在5%FS以下 |
重復性 | ±0.1%讀數，從1%～100%FS ±0.001%FS，在1%FS以下 | ±0.2%讀數，從5%～100%FS ±0.01%FS，在5%FS以下 |
精確度1 | ±0.25%讀數，從1%～100%FS ±0.0025%FS，在1%FS以下 | ±0.32%讀數，從5%～100%FS ±0.016%FS，在5%FS以下 |
預測的穩定度2 | ±0.15%讀數，從1%～100%FS ±0.0015%FS，在1%FS以下 | ±0.2%讀數，從5%～100%FS ±0.01%FS，在5%FS以下 |
測量不確定度3 | ±0.5%讀數，從1%～100%FS ±0.005%FS，在1%FS以下 | ±0.5%讀數，從5%～100%FS ±0.025%FS，在5%FS以下 |
molbloc-S（所有量程）
除了沒有微量程以外，其他技術指標與molbox RFM相同。只要將molbox RFM連接到molbloc-S上，就會禁用微量程傳感器。
1 精確度：包含線性度、遲滯和可重復性。
2 預測的穩定度：典型molbox RFM和molbloc在典型環境下使用時一年內從零到范圍值的最大變化情況。由于穩定度只能是一種預測，因此應該根據經驗建立特定molbox RFM的穩定度。
3 測量不確定度：molbox RFM流量指示相對于通過molbloc的流量真值的最大偏差，包括精確度、穩定度和DHI校準標準不確定度。molbloc的測量不確定度技術指標僅適用于使用的是molbloc校準過的氣體的情況。所有 molbloc 都針對N2校準過。其他氣體的校準是可選的。并非所有規格的molbloc在所有時間，對所有氣體都提供DHI校準功能。請在訂購前檢查是否可用。
型號和配件
型號 | 描述 |
Molbox RFM | molbox RFM參考流量監控器 包含： |
5141-100 | molbox RFM, molbloc 5E1-L 10 to 100 sccm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 5E1-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5141-1K | molbox RFM, molbloc 5E2-L 100 to 1,000 sccm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 5E2-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5141-10K | molbox RFM, molbloc 5E3-L 1 to 10 slm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 5E3-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5141-50K | molbox RFM, molbloc 3E4-L 5 to 50 slm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 3E4-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5142-1K | molbox RFM-M, molbloc 5E2-L 10 to 1,000 sccm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 5E2-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5142-10K | molbox RFM-M, molbloc 5E3-L 0.1 to 10 slm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 5E3-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5142-50K | molbox RFM-M, molbloc 3E4-L 0.5 to 50 slm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 3E4-L laminar flow element ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5144-50K | molbox RFM-M, molblocs 5E2-L and 3E4-L10 sccm to 50 slm Included： ?molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual ?molbloc 5E2-L and 3E4-L laminar flow elements ?molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L ?Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
配件 | 描述 |
MFC-CB控制盒 | 包括： |
針對molbloc/molbo用戶的校準輔助軟件 | |
molstic-L安裝系統 | |
molstic-S安裝系統 | |
RFM-RMK | 機架安裝工具 |
RFM 02 | 微量程 |
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